Different from general analytical instruments, the sensitivity of the detection capability of the particle size analyzer is basically not measured. The resolution measurement is divided into two situations, namely high and low resolution. If the resolution of the laser particle size analyzer is low, it is not measured internationally. The method currently adopted in our country is to define the resolution as the particle size interval that can be distinguished by the bimodal distribution of two particle size peaks. Obviously, the resolution defined in this way will be different for different granularity segments. The particle size interval we specify is 5~15um. The two particle size peaks should be separated and the resolution is qualified, otherwise it will not be qualified. Another example is the photoresist liquid particle counter, which has high resolving power. The resolving power is usually defined as
Where ---the standard deviation of the unimodal distribution measured by this instrument
— --- Provides the standard deviation of the unimodal distribution of the CRM
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